I. Introduction
Due to expensive construction and operation, observation time of world-class mm&sub-mm telescopes are precious. Focal plane multipixel receiver which can increase telescope’s the field of view and maximize its mapping speed [1] is an intuitive solution to increase usage efficiency of telescopes. To build a large format heterodyne multipixel receiver, having a compact and easy to be scaled up multipixel receiver module is crucial. Shan et al [2] demonstrated its development feasibility with planar integration. Most components can be integrated on a signal chip with planarized sub-mm circuit. However, some key components for building this module in the sub-millimeter range are still challenging [3], like RF (LO) probes, planar LO power distributor, planar RF/LO couplers, RF impedance matching circuits, and SIS mixers.