Piezoelectric MEMS Mirror with Cantilever-Type Actuator for Compact, Low-Voltage Drive, and Wide-Angle Deflection

A resonant piezoelectric MEMS mirror with cantilever-type actuators is proposed, and a wide scan angle is demonstrated with small chip size and low voltage.The effective chip size, mirror size, optical scan angle, and drive voltage are 5.2 × 3.8 mm
²
, 1 × 1.2 mm, over 90°, and 7 V
pp
at around 20 kHz, respectively. The proposed MEMS mirror offers advantages for applications to devices with constrained mounting areas, such as HMDs, smart glasses, and pico-projectors.