Spectroscopy for Continuous Light with a Submicron Grating Mems Cantilever Plasmonic Photodetector

In this study, a MEMS plasmonic photodetector with a cantilever was developed to perform spectrum analysis for the spectrally continuous white light. The reduction of the grating pitch on the plasmonic photodetector to sub-micron size provided a one-to-one correspondence between the incident angle and the wavelength in the target bandwidth. The pitch reduction enabled the plasmonic photodetector to reconstruct the near-infrared white light within the range of 1170–1350 nm. This spectroscopy result was consistent with commercial spectrometer results. The device's design, exploiting principles of plasmonic resonance, offers potential for further size reduction and diverse driving mechanisms, providing a versatile platform for compact and efficient spectral analysis.