1. Introduction
Mid-infrared laser spectroscopy has been applied various kind of gas sensing applications due to unique feature of transmission spectra called fingerprint region [1]–[2]. Recently, MOEMS-based compact external cavity quantum-cascade lasers (EC-QCLs) enabling broadband wavelength-swept exceeding 200 cm-1 was developed [3]. Appearance of the developed EC-QCL was shown in Fig. 1. Thanks to this compactness, spectroscopy system can be integrated in small footprint to be a portable, and it is expected to be adapted to broad range of applications more than gas sensing such as healthcare application [4]. However, as a light source it is said that the EC-QCLs are inferior in stability of light output intensity compared to conventionally used light bulb of glowbar. In this paper, differential detection technique is applied to suppress noise generated from intensity fluctuation of EC-QCLs, and demonstration of wideband transmission spectrum measurement of methane over 200 cm-1 is reported.
Appearance of the developed MOMES-based EC-QCL packaged in a butterfly package. Its size is 12.7 × 30 × 13.1 mm excluded pins.