A W-band Cavity Backed Slot Antenna Based on Multi-Layer Silicon Platelets

In this paper, a wideband multi-mode cavity backed slot antenna (CBSA) is presented. It is composed of four layer silicon platelets, which are radiation slot layer, resonant cavity layer, feeding slot layer, and feeding waveguide layer. Two higher cavity modes
$(\text{TM}_{130},\ \text{TM}_{310})$
are utilized in this antenna, leading to a bandwidth over 11 %. As an example, a w-band CBSA is designed. Simulation results show its work bandwidth
$(\vert \mathrm{S}_{11}\vert \leq-10\text{dB})$
is from 83.9 GHz to 93.7 GHz, and the peak gain is 13.2 dB ~13.4dB.