High Frequency Thin Film Magnetics-on-Silicon with Improved Inductance and Resistance

In the electronics industry there is a significant trend towards miniaturization of electronic devices. At the same time, system functionality should continue to be guaranteed or improved. To support the increasing level of integration, magnetics-on-silicon is introduced [1]. The main goal of this paper is to show improvement compared to previous works [1] by increasing the magnetic core and copper thicknesses.