Noise-Driven MOF-Coated NEMS Sensors

In this work, we explore the potential of noise-driven nanoelectromechanical system (NEMS) inertial sensors which combine exceptional sensitivity to low power consumption making them ideal for portable gas sensors. First, we demonstrate the enhanced responsivity of MEMS acetone sensors once they are equipped with a selective, zinc oxide (ZnO)-based, Metal-Organic Frameworks (MOFs) resulting in exceptional responsivity of
$R=0.3$
Hz/ppm and a limit of detection of 9 ppb. Then, we introduce a novel ~ 250 nm thick NEMS sensor, made of a ZnO film, that serves as both structural and sensing layers. The NEMS sensor is noise-driven in air enabling simpler and low power consumption sensors. The sensors responsivity to acetone was found to be
$R=0.15\ \text{Hz/ppm}$
. Our findings pave the way for the development of MOF-coated NEMS sensors, promising groundbreaking advancements in the gas sensing field.