Integrated Terahertz Beamforming System Based on Micromachined Silicon Interposer

Terahertz communication is approaching the center of the stage in such a date-rate-demanding era. However, there are still several issues to be solved including integration and beam steering before bridging the gap between the generated THz wave and its practical usage. In this paper, three silicon-micromachined THz modules associated with THz wave radiation and transmission and their simulation results are presented. The 4×1 phased array achieves a realized gain of 10.2 dBi and a beam steering range of ± 22°. The CPW-to-hollow waveguide transition structure exhibits a bandwidth of about 50 GHz at -10 dB level and a return loss lower than -45 dB at working frequency. The proposed micromachined silicon platform reveals great scalability and potentials in integrated THz systems.