EUV Energy Efficiency

Energy efficiency of the ASML EUV lithography systems is being improved by increasing productivity while at the same time reducing absolute energy consumption. The latter is achieved via sleep mode, hydrogen re-use and tower-cooled process cooling water.

I. Sustainability in the semiconductor industry

The IC industry plays an important role in the energy transition, e.g. by enabling innovations like smart grids, remote working and optimized logistics [1]. At the same time IC manufacturing itself requires a significant amount of energy. With ever increasing demand for semiconductor devices, the industry has to reduce its carbon footprint to limit the effects of climate change.