Design and Simulation of 30 GHz Micro-Electro-Mechanical Systems (MEMS) Resonators

Wireless communication networks have grown at an exponential rate in recent years. This is primarily owing to the development of small-scale, high-performance devices. A resonator is a key component in many communication devices such as oscillators, duplexers, and filters. On-chip resonators that are based on microelectromechanical systems (MEMS) have demonstrated tremendous potential for a variety of applications in recent years. This is owing to their great characteristics that distinguished them from quartz crystal resonators, such as the CMOS IC technology integration, small size, high frequency-quality factor product, low power consumption, and low batch manufacturing cost. In this paper, a novel class of MEMS resonators is designed and simulated using MATLAB 2021b. The lithium niobate (LiNbO3) thin film has been used to achieve resonance frequencies of 30 GHz using the seventh order asymmetric (A7) Lamb-wave modes.