Optimization of Timelinks in Semiconductor Manufacturing

Impact of timelinks to semiconductor manufacturing has risen due to shrinking technology sizes. Their operational control defines on the one hand how good the time restrictions are met and on the other the impact to fab capacity. This paper discusses both aspects and the influencing factors like uptime stability, length of the timelink etc. A control approach is proposed, evaluated, and discussed. Furthermore, a monitoring system is introduced that enables for fast decision making and optimization of the control parameters. Finally, a simulation study is done for evaluating different parameters and impact of influencing factors.