Contents I. Introduction
As the substantial increase in global demand for electronic devices, the semiconductor industry has developed over the past decade [1]. This trend, however, causes environmental issues regarding wastewater quality. The wastewater discharged from the semiconductor industry typically contains high levels of ammonium, fluoride, and phosphate from the semiconductor manufacturing process (i.e. cleaning, film deposition, resist coating, etching, etc.) [2]. In particular, as the total ammonia nitrogen (TAN), most notably the ammonium in wastewater, have an adverse impact on aquatic ecosystems, it is regulated to be discharged less than a concentration of 10 -20 mg/L [3], [4]. Fluoride-containing wastewater produced by the semiconductor manufacturer contributes to 40% of hazardous waste [5], [6]. According to WHO, the fluoride level in drinking water is less than 1.5 mg/L [1].
