Reliability Rereasch of a MEMS Flow Sensor with Accelerated Degradation Testing

Ensuring reliability is a key aspect of sensor quality. With the advancement of accelerated degradation testing, it has been widely applied as an efficient strategy to obtain the reliability (life) information on assets. In this article, the reliability test results of a Micro Electro Mechanical System flow sensor based on accelerated degradation testing are researched. Aiming at the reliability problem of this flow sensor's lifetime, temperature stress are considered accelerating conditions. The drifts of flow sensor chip with and are obtained, respectively. On this basis, the Arrhenius model was used by calculating the drift of characteristic parameters to acquire the mean time to failure) of assets in various conditions. In addition, the Weibull Distribution is proved to be the better mode for the flow sensor acceleration life. To verify the rationality of the distribution, the Goodness-of-fit tests were performed using the residual method. The Standard residual error method and Cox-Snell residual error method were used separately, the Anderson-Darling”. value of the Standard residual error and Cox-Snell residual error was 1.728. It proved that the selected life distribution model of this flow sensor with accelerated degradation testing is befitting. This research provides a good way for reliability analysis of thermal mass flowmeter units. Based on those results, we could set up a reliability database for this flow sensor.