Modelling and Control of a Parametric Wafer Manufacturing Process

In the present paper the mathematical model of a wafer manufacturing process is presented using Discrete Event Systems. The novelty of the proposed mathematical description is the parametric number of vacuum chambers and robotic manipulators, as well as that three vacuum chambers and the respective buffers are served by each robotic manipulator. The last robotic manipulator serves a parametric number of champers depending on the total number of vacuum chambers modulo 3. The desired behavior of the process is expressed in the form of a set of regular languages. The realization of each regular language in the form of a supervisor automaton is developed. The satisfactory performance of the controlled automaton is derived. The present result can be considered as the first attempt towards the study of wafer manufacturing processes, where each robotic manipulator serves a parametric number of vacuum chambers and buffers.