Solutions to Calibration Errors of OPC Models for Special Pattern Below 40 NM Nodes*

The accuracy of OPC (Optical Proximity effect Correction, OPC) model is closely related to product yield. An accurate OPC model is the guarantee of successful development and mass production yield. However, for some special pattern, the fitting results cannot be changed even if their weight is increased. This paper is investigated the special pattern fitting error and we find out the reasons for this behavior of OPC model and give solutions. The OPC model is resist model of synopsys, and use progen as model building tool.