Adaptive Disturbance Input Decoupling for Galvo Motor based on Resonance Frequency Estimation

This paper presents an innovative approach to enhance the position control performance of Galvo motors utilized in laser processing applications, such as laser engraving and drilling systems. These motors often experience high-frequency torque disturbances resulting from the mechanical coupling between the motor shaft and reflected mirror. To address this challenge, an adaptive disturbance input decoupling (DID) is introduced, specifically tailored to compensate for high-frequency disturbances. Moreover, a resonance frequency estimation method is proposed to accurately estimate the resonance frequency required for disturbance compensation. The proposed approach is implemented in a digital control system and extensively evaluated through preliminary simulations. The simulation findings demonstrate the remarkable potential of the proposed approach in significantly improving the stability and accuracy of Galvo motor-based systems.