SiN-based integrated optical phased array for 2D beam steering at 905nm

We present development work relating to integrated optical phased arrays (OPA) for use in a 905nm time-of-flight (TOF) LIDAR system. Pseudo two-dimensional, single wavelength beam steering from a 7x32 channel silicon nitride-based photonic circuit was achieved, with optimized single-pass thermo-optic phase shifters with Pπ = 30mW. Direct optical coupling of a photonic chip to a 7 W tapered GaInAsP laser diode is also shown to suggest a pathway to achieving medium-to long-range integrated LIDAR using a low-cost light source.