Design and Investigation into the Beam Structures for Improving Cross-beam Multi-axis Force Sensing Performance

Multi-dimensional force sensors commonly utilize sensing beam structures for pursuing their high sensitivity and multi-axis measurements. To achieving high-performance of such sensors, research has predominantly focused on material improvements, sensor configurations, and efficient algorithms. However, leaving alone the sensor beam, one of the core components, relatively unexplored amid rapid technological advancement. This study addresses this gap by investigating into sensor beam designs and refinement, aiming to enhance sensor performance. The potential for improved accuracy, stability, and adaptability through the sensor beam refinement underscores the significance of this research.In detail, the study commences with an examination of strain distribution across sensor beams of varying geometries, facilitating the identification of an optimal configuration tailored to the project’s application. In addition, the slot size adjustments are applied to the beam design, yielding improvements in sensor performance. Conclusively, an analysis of frequency response characteristics is conducted to ascertain the superior design iteration for the designed sensor beams. This investigation underscores the paramount importance of beam design refinement in augmenting multi-dimensional sensor functionality.