Modeling of the Stress State During Sclerometry of Zirconium Magnetron Coatings

When determining the adhesion force of coatings deposited by the magnetron method, a mathematical model has been developed that allows, based on the calculation of internal stresses, to determine the adhesion force without reference samples. The proposed calculation model using the principle of superposition from several point stress sources made it possible to explain the nature of peeling due to the occurrence of tensile stresses along the depth of the sample. In this article we suggest an as simple as necessary approach of adhesion strength measurement for coatings. The approach could be demanded for microelectronics. The adhesion strength is a significant variable during the following process as heating, lithography, and applying the next layer. It can cause coating peeling. Suggested approach also has an advantage, it doesn’t require reference samples. And there is opportunity to measure adhesion strength for any coating-base combination using sclerometry data and the suggested models calculations.