I. Introduction
Single-sided flat-plate permanent magnet synchronous linear motors (FP-PMLSM) have the advantages of high thrust density, high speed, high acceleration, high dynamic response, etc., and are widely used in advanced CNC machine tools, photoetching machines and other precision equipment [1–2]. In single-sided FP-PMLSM, not only is there a fluctuating horizontal thrust, but there is also a normal suction force between the primary and secondary of the motor that is an order of magnitude greater than the thrust [3]. During motor motion, the normal force fluctuates periodically due to cogging effect, end effect, and armature reaction. When PMLSM are used as the core feeding parts of precision equipment, the fluctuation of motor normal force will cause friction perturbation, which restricts the further improvement of precision equipment machining accuracy [4].