Monolithic Micro LED/ Semiconductor Metal Oxide Sensor Towards Ultra-Low-Power and Intelligent Gas Sensing

Nowadays, gas sensors have assumed vital roles in a wide range of industries and everyday life. The increasing concern over air pollution and growing focus on maintaining a healthy environment have contributed to the expanded use of gas sensors. Nonetheless, conventional gas sensors suffer from a significant drawback - they consume a large amount of power. Consequently, there is a notable surge in research efforts aimed at developing micro/nano-fabricated, low-power gas sensors. Recently, we have achieved a significant breakthrough by creating a monolithic device platform that combines micro-LEDs with semiconductor metal oxide gas sensors, enabling ultra-low-power gas sensing. Compared to the conventional MEMS microheater-based gas sensor platform, our innovative solution consumes over 1000 times less power. Additionally, we have harnessed the power of machine learning algorithms to enhance the capabilities of this platform, making it capable of intelligent gas sensing. With these advancements, our new gas sensor platform holds tremendous promise for applications where power consumption needs to be minimized while ensuring efficient and intelligent gas detection and monitoring.