Design and Adaptive Control Method for STM Separating Nano Positioner

Scanning Tunnel Microscope (STM) is an advanced detection instrument that can explore the surface structural characteristics of substances on a nanoscale. As a decisive component, nano positioner directly determines its scanning speed and accuracy. However, existing STM positioner has some issues such as structure complex, susceptibility to interference and nonlinearity, which may cause the system uncontrollable and even vibrating. Therefore, the nano positioner with separating structure and its measurement system are designed firstly, which are anti-crosstalk, easy to disassemble and connect with other instruments like Raman spectrometer. Meanwhile, an adaptive fuzzy linear active disturbance rejection control (Fuzzy-LADRC) method is proposed. It combines advantages of fuzzy and ADRC theory with features of self-adjustment parameters, self-disturbance rejection, high accuracy, and fast response. Experiments show the effectiveness of proposed separating nano positioner and adaptive control method.