Equivalent Circuit Model and Simulation of 2D Asymmetrical PMUT for Non-Destructive Testing

Miniature, low-power transducers and arrays of such transducers that are linked to electronic systems are employed in a variety of ultrasonic applications, such as sensing, actuation, and imaging. One alternative to integrated piezoelectric micromachined ultrasonic transducers (PMUTs) is thin film flexural transducers, which resemble a diaphragm and are usually produced on silicon substrates. First, an equivalent circuit model of the PMUT system has been discussed, followed by an analysis of the thin film piezoelectric transducer using simulation on various mediums. We present measurements of the PMUTs inherent electrical, mechanical, and acoustical characteristics. The presence and absence of solid objects does a significant change in the behavior of the acoustical waves that propagates from the simulated PMUT in different mediums.