FDTD Simulation for Optical Characteristics Study of Inverted Micro-pyramidal Surface Structure of Black Silicon

This paper reports optical characteristics study of Black Silicon (BSi) containing inverted micro-pyramidal structure on p-type single-crystalline silicon (100) (sc-Si) surface. Finite-Difference Time-Domain (FDTD) simulation is conducted in three diverse modellings for analyzing the effects of light incident and reflectance based on surface morphology. The approach of each modelling is described by designing the microstructure and then acquiring the reflectance results, followed by observing the simulation results of the microstructure characteristics of vectors and electromagnetic fields as a function of position and wavelength. The final approach investigates the optical characteristics in the influence of irregularly distributed inverted micro-pyramidal structures of the real BSi structure surface, an analogous structure with exact dimensions. The characterized samples were obtained by metal-assisted chemical etching containing inverted micro-pyramidal surface structures. The findings revealed the optical characteristics of inverted pyramidal microstructure using a numerical 3D image reconstruction algorithm followed by FDTD simulation.