Effects of Structural-Phase Acousto-Induced Transformations with Fractal Self-Organization for Vanadium Oxide Nanocrystals

For the first time, acoustic waves were used during reactive magnetron sputtering of V$O_{x}$ films to improve their structural quality. It was found that the efficiency of V$O_{x}$ synthesis depended on the modes of external ultrasound loading. The elemental-phase composition of V$O_{x}$ film surfaces was studied by XPS photoelectron spectroscopy and SEM micrographs. It was found that the quality of the film structure was improved with the additional use of ultrasound loading to the substrate during the deposition process. The XRS spectra of the samples obtained under ultrasound loading showed some narrowing of both bands (V2$p_{1/2}$ and V 2$p_{3/2}$), which was determined by the electronic structure of vanadium atoms. Improving the structure of V$O_{x}$ films under ultrasound loading was confirmed by the results of the SEM image study: for the samples obtained under the conditions of additional ultrasound loading, an arrangement and increase in grain size were observed.