Analysis of SAW Propagation Properties on Piezoelectric Substrate with Periodic Voids

Bonded structures with periodic voids exhibit resonance properties that closely resemble plate waves; however, spurious responses appear under certain structural parameters. To investigate the cause of these spurious responses, we analyzed the frequency responses between the input and output interdigital transducers on a LiNbO
3
/quartz bonded structure with periodic voids at the interface of the bonded boundaries. The bandgap frequency can be controlled by periodic voids at the boundary surface between the thin plate and the support substrate. It was confirmed that the upper or lower bandgap frequency matched the spurious frequency in the resonance property on the bonded structure with periodic voids.