Aluminum Nitride (AlN) based Interspace Structure Resonator (ISR) Achieving Effective Coupling Coefficient over 10%

This work proposes a new class of interspace structure resonator (ISR) based on aluminum nitride (AlN) achieving a high effective coupling coefficient $\left( {{k^2}_{eff}} \right)$. The ISR combines both d
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and d
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piezoelectric coefficients and excites a single mechanical vibration mode. The impact of the design parameters on the resonant frequency, impedance, and ${k^2}_{eff}$ of ISR is systematically investigated. Finite element analysis simulation shows that ISR achieves a high ${k^2}_{eff}$ of 11.0% and maintains lithographical frequency tunability simultaneously.