Study of voltage-induced ferroelectric domain inversion on POI based SAW resonators

SAW resonators built on Smart Cut™ POI wafers are electrically and thermally stressed in order to assess their robustness and the evolution of their characteristics with the occurrence of domain inversion. It is shown that the coercive field is higher than expected, and that specific domain features develop above this threshold. The impact of physical evolution of the substrate on resonator figures of merit is discussed. POI, LTOI, SAW, resonators, ferroelectric domains, switching, stress.