Fabrication and Optimization of Single Nanowire Optoelectronic Devices Based on Atomic Force Microscope

1D photodetectors have attracted widespread attention because of their superior properties, however, the controlled fabrication and optimization of 1D photodetectors are still demanded. We reported a method of using AFM probe to fabricate nanowire photodetector as well as increase the contact between nanowires and metal electrodes through mechanical force applying. We used atomic force microscopy (AFM) to precisely move ZnO nanowires across electrodes to form photodetectors with an alignment resolution down to 100 nm. In addition, to increase the electrical contact of ZnO nan- owires and metal electrodes, we exerted force via AFM probe precisely on the nanowires. Results showed that the dark cur- rent of single ZnO NW increased by an order of magnitude from 45 nA to 500 nA. Finally, we further applied this AFM technique to construct a graphene/single ZnO nanowire/gra- phene photodetector. The fabrication process based on AFM involves minimal damage and contamination to the nanowire. And the mechanical force exerted by the AFM probe can en- hance the quality of the contact between the nanowires and the electrodes and improve the optoelectronic properties of the device.