A 300-GHz Slotline-coupled Double-oscillator Emitter Integrated in 65-nm CMOS

This contribution presents the design and experimental characterization of a submillimeter-wave source composed of two coupled harmonic oscillators that emit coherent radiation at around 300 GHz. The unitary oscillators are based on a self-feeding topology, which incorporates an on-chip slot antenna for second-harmonic radiation. Both units are injection-locked by each other through their respective slotline resonators so that, in the desired synchronous state, a standing wave is sustained across the array with a virtual short circuit at the connection point. The implemented circuit layout is fully compliant with the used 65-nm CMOS technology from TSMC. All measured samples oscillate at approximately 290 GHz, indicating an offset of less than 3.5% from the target oscillation frequency.