Rapid Release of Micro-Objects by Using Compound Drive Vibration

A release operation method based on vibration control of a compound-driven microgripper is proposed for the adhesion phenomenon of micro-objects released by the microgripper in micro assembly. The gripper is driven by a composite of a piezoelectric stack and a single-layer piezoelectric ceramic, and the gripping stroke can be expanded to 115.
$26\ \mu \mathrm{m}$
by a two-stage amplification mechanism. The pull-off forces required to release different objects are analysed using JKR elastic adhesion theory, and the feasibility of using the vibrations of the piezoelectric cantilever beam to generate inertial forces for release is demonstrated. Finally, an experimental system was built to test the gripper stroke. Release experiments were performed with 200
$\mu \mathrm{m}$
polystyrene spheres and 160
$\mu \mathrm{m}$
precision-printed cylinders. The results show the effectiveness of the vibration release strategy.