Development of a data analysis system based on the long-cycle stability of silicon resonant pressure sensors

Long-cycle stability is one of the most important indicators of the performance of silicon resonant pressure sensors. Long-cycle testing of this sensor within the industry currently relies on real-time comparison of pressure standard sources and has not yet been automated to measure calibration comparisons. With the development of technology, digital virtual instruments are gradually replacing traditional test equipment. In this paper, a data analysis system for the long-cycle stability of silicon resonant pressure sensors is designed by studying the long-cycle stability of silicon resonant pressure sensors and their testing methods. The system is implemented as an ASP.NET-based client, which reads the test data during the time period through a client-side front-end request and uses a multi-sensor fusion algorithm instead of a pressure standard source to calculate the reference value and uses time aggregation to find its error, enabling a real-time view of the test data in a local area network report and an alarm for the error point. After a long period of testing and comparison, the system can effectively achieve the reference value and error without the pressure standard source, and effectively achieve the user to view the test data and alarm information anytime and anywhere.