Performance Factor Evaluation of Multifunctional Metasurface for Chip Scale Atomic Clock (CSAC)

In this study, a metasurface with integrated optical functions was designed and fabricated for use in chip scale atomic clock (CSAC). This enables a highly efficient and compact atomic clock. The metasurface is 300 $\mu$m square and is given a deflection angle of 19.48° and the quarter-wave plate functions. In this paper, the metasurfaces were designed and fabricated with meta-atom shape corrections to identify factors that affect the deflecting function. As a result of evaluation, it was found that the fabrication accuracy of the meta-atom shape contributes to the deflection efficiency than the accuracy of the meta-atom width.