Ovenized Dual-Mode ZnO-based Solidly Mounted Resonator

In this work, we report a novel ovenized dual-mode solidly mounted resonator for potential applications in gravimetric sensing. We propose using a resistive micro-heater embedded within the resonator structure for ovenization to achieve highly localized heating for frequency tuning. Also, the dual-mode structure has two resonance modes with opposite reactions to temperatures owing to their temperature coefficient of frequency (TCF) which we utilize as a thermometer. In this proof-of-concept work, we demonstrate the frequency tuning achieved by using joule heating resulting from the micro-heater. The tuning efficiency for Mode I and II of the dual-mode device was observed to be 7.6 ppm/mW and -9.641 ppm/mW, respectively.