Dynamic Hysteresis Modelling for a PZT-Driven Micro-Operation Stage

Micro-operation robot systems can complete micro/nano level operations, and play an increasingly important role in scientific research, industrial production, and other fields. Precision positioning technology is one of the key technologies for micro-operation robots, and positioning accuracy directly affects the Operational performance. Piezoelectric ceramic actuators are widely used in the micro-operation field because of their advantages of high resolution, high bandwidth, small size, etc. However, they own hysteresis nonlinearities, leading to inaccurate positioning performance of the Piezoelectric ceramic. This paper characters the hysteresis in micro-operation platforms driven by Pb-based Zirconate Titanates (PZT) actuators and a data-driven model in a series mode to describe the dynamic hysteresis is developed. In addition, the weights update process of the particle swarm optimization algorithm are improved to enhance identification accuracy of the proposed model. The experimental results show that the modeling method proposed in this paper can not only describe the asymmetric hysteresis characteristics of PZT -driven micro-operation stage, but also describe their rate correlation, thereby accurately predicting the dynamic hysteresis behavior of PZT -driven micro-operation platforms.