New Spectrum Imaging Method for Solid Surfaces with Secondary Electrons acquired over Wide Energy Range (>1000 eV)

Electron spectroscopy such as Auger electron spectroscopy (AES) and reflection electron energy loss spectroscopy (REELS) has been developed as a useful technique for chemical state and compositional analysis of surface regions with high spatial and depth resolution. In this report, we present a newly developed spectrum imaging method by using electron spectroscopy which visualizes the elemental distributions on the top surface of the materials from SEM imaging.