Towards a 5G n260 Band Phased Array Based on Vanadium Dioxide Switches

A four element phased array design on silicon operating in the 5G n260 band is presented. The design incorporates a true time delay (TTD) phase shifter based on vanadium dioxide switches to select variable lengths of coplanar waveguide (CPW) transmission lines. A cavity backed slot antenna is implemented on a silicon substrate so that the array may be fully integrated. The phase shifter demonstrates a maximum insertion loss of 7.4 dB over the range of 37–40 GHz, with 11.25° of phase delay resolution and a 47°/dB figure of merit. The four element array demonstrates beam steering from −35° to +35° in the H plane.