Carbon Nanotubes Dispersion for Humidity Sensor Devices

Due to their stability, single-walled carbon nanotubes (SWCNTs) have been used for multiple applications in the semiconductor industry. Herein, we report the humidity sensing capability of SWCNTs by comparing the different densities of SWCNTs dispersed on the sensing area of the planner sensor device. Three different humidity sensors have been fabricated by preparing three different densities of CNTs diluted in deionized water and drop cast on the channel of 100 μm width between 2mm x 1mm gold electrodes. It is observed that for very low density and high density of SWCNTs sensing layer, the sensing behavior either lacks in the detection range and response time, respectively. However, we found the optimized density of SWCNTs in deionized water for a highly sensitive, fast, and high-range humidity sensor for the optimized density of SWCNTs in deionized water.