Crossed Anisotropy Multilayered Nanogranular Films Combining High Permeability, Ferromagnetic Resonance Frequency, and Resistivity

In-plane isotropic crossed anisotropy multilayer for high-frequency was fabricated using in-plane uniaxial anisotropic nanogranular film because of its high permeability, ferromagnetic resonance (FMR) frequency, and electrical DC resistivity. The multilayer exhibited in-plane isotropy and enabled us to combine permeability of 100, FMR frequency of 3 GHz, and resistivity of 5 μΩ∙m, and furthermore, low damping factor of 0.015 was obtained, and hence the multilayer can be available to us for a low loss up to 1 GHz. On the other hand, underlayer and cap layer were necessary for isotropy of the multilayer. These may contribute to the relaxation of interfacial stress.