A 2-D Multi-Dielectric Capacitance Solver Based on Floating Random Walk Method

We present a 2-D capacitance solver based on floating random walk (FRW) method for handling realistic interconnect structures in ICs. The solver is able to accurately simulate the structures with multiple and conformal dielectrics, and circular conductors in the cross-section of 3-D IC. An approach of using transition circles and space management is proposed to accelerate the computation for structure with circular conductors. A visualization interface is presented to demonstrate the FRW algorithm as well. Experiments with industrial cases show that the presented solver runs much faster than the existing solvers based on finite difference method (FDM), while preserving reliable accuracy with error within 3%.