Study on Optimazation of Carbon Nanotube Nano-Cold Cathode Array for an Electron Beam Pumping Ultraviolet Light Emitting Device

Ultrawide bandgap (UWBG) semiconductor luminescence pumped by electron beam (EB) is a feasible strategy to achieve high-performance deep ultraviolet (DUV) source device. In this study, by optimizing the carbon nanotubes (CNTs) nano-cold cathode array in a proposed EB-pumped DUV device, we achieved enhanced cathode electron emission efficiency and then improved the light emitting intensity. The CNTs were designed into different geometric patterns and arrangements, and then were fabricated out by a high energy laser etching method. After transferred onto the cold cathode, the field emission properties of the optimized CNTs array were demonstrated to be improved, thus will further improve the luminescence performance of the DUV light source device when the CNTs act as an excitation source.