An Extended Mason Model for Spurious-Mode Modeling of High Q FBAR Resonators

An extended Mason model for FBAR resonators was introduced to model parasitic modes below the resonance frequency and sub-resonances arising from the frame structure. The predictions of the model are compared with on-wafer measurements of film bulk acoustic resonator (FBAR) resonators with different impedance. Simulated and Measurement results show that the abrupt change of the Q-factor near the resonance frequency f
s
can be well modeled, and the proposed model accurately represents the parasitic modes and sub-resonances of resonators with different frequencies and impedances.