Research on position servo control method of micro-motion stage based on direct-drive of voice coil motor

The precision stage driven by high frequency and short stroke voice coil motor, and the flexible spring is designed to provide sufficient stiffness for the system. The straightness error compensation system of inkjet printing scanning axis is established, the mathematical model of voice coil motor direct-drive micro-motion stage is analyzed, and the servo control method of this kind of motor is studied. A position closed-loop controller based on P-D control is proposed to enhance the anti-interference ability of the system. The experimental results show that this method can meet the requirements of the straightness accuracy of the scanning axis of inkjet printing and has strong robustness.