Adaptive Learning Control with Extended Bandwidth for Synchronization Motion Stages

This paper proposes a novel method to improve synchronization precision and reduce the influence of stochastic noises in lithography motion stages. Specifically, the multiple-channel adaption-learning-function synchronization iterative learning control (MASILC) method we give uses a multiple-channel approach based on A-type of ILC, with adaptive parameters to address the divergence situation caused by stochastic noises in different channels. We verify the superiority of the MASILC method and analyze its stability and convergence performance in theory. Furthermore, we introduce an effective adaptive method inspired by the stochastic acceleration optimization method. Simulation comparisons with analogous approaches demonstrate the effectiveness and superiority of the proposed method in various circumstances.