A suspended micro-bridge structure nano-air-channel triode with a deformable anode

In this paper, a suspended micro-bridge structure nano-air-channel triode with a deformable anode is proposed. The triode removes the insulating dielectric used for inter-electrode supporting in conventional vertical structure nanoscale air-channel devices, in order to improve the effective emission area of the cathode and reduce the capacitance, as well as avoiding the influence of the dielectric on the performance of the triode. In addition, the anode deformation can be modulated to change the length of the nanoscale air-channel by adjusting the bias voltage, which contributes to an enhancement of the cathode electric field strength and a stronger emission current density.