Improved Shape Memory Alloy-based MEMS Perforated Switch for RF Applications

The reported work emphasizes on the modelling of RF based Micro Electro Mechanical System (MEMS) switch to improve the actuation methods. The material used for the actuation is Nitinol. The used material is a shape memory alloy (SMA) and is used due to its excellent properties like super elasticity and remembering its original shape. The simulation results shows that SMA based switch achieves a deflection of 1. 2μm when 0. 2V of input voltage is applied. Further, the switch is perforated uniformly and when the same input voltage is applied to it, the deflection thus obtained is 5E-5m. COMSOL Multiphysics is used to model and simulate the results.