Semantic modeling for smart manufacturing: towards a data alignment through knowledge formalization for semiconductor wafer fabrication

This paper describes a new approach for the data alignment in the front-end part of semiconductor manufacturing, i.e., wafer fabrication. The approach is based on semantic modeling techniques and focuses on the formalization of engineering knowledge through the creation of a network of ontologies for the modelling of wafer fab equipment. A methodology for the creation of such a model is presented as well as an example for the verification of its consistency through a practical use case for STMicroelectronics Crolles 300mm fab