Dynamic Quality Factor Equalization for Improved Bias Stability in Mode-Matched Gyroscopes

Dynamic quality factor equalization using ferroelectric materials to tune mechanical quality factor is demonstrated. An initial quality factor split of ~ 10% was controlled to less than 0.27% for three quarters of measurement samples. This mechanism is promising for improving bias stability in mode-matched gyroscopes and can be integrated into microelectromechanical mode-matched gyroscopes, or even macro-scale mode-matched gyroscopes to realize electronically controlled mechanical quality factor matching between degenerate modes.