High Q-value Solid Mounted Resonator Based on Aluminum Nitride Film

The transverse acoustic energy leakage in solid mounted resonators (SMRs) generally affects the Q-factor of the resonator. In this work, a design based on lateral high and low acoustic impedance structure is proposed to confine the energy of SMR. The measured results show that the Q-factor of the designed high-Q SMR is 59% higher than that of the traditional SMR.