A MEMS-Based Gravimeter for Simultaneous Vertical and Horizontal Earth Tides Measurements

This paper reports a MEMS gravimeter enabling simultaneous gravity measurements in both horizontal and vertical directions by combining two MEMS gravity sensors with an identical low-frequency linear spring structure. The proposed paired MEMS gravity sensors both experimentally demonstrate ultra-low self-noise floors of < 2 μGal/√Hz@1 Hz. The assembled gravimeter successfully measures long-term Earth tides signals with a high sensitivity and stability, showing the potential for three-axis gravity measurements.